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[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - Single Metal/Dual High-k CMISFETs without High-k-induced Vth Variation by MgO or Al2O3 Incorporation
Mise, Nobuyuki, Morooka, Tetsu, Eimori, Takahisa, Ono, Tetsuo, Nara, Yasuo, Ohji, YuzuruVolume:
16
Year:
2008
Language:
english
DOI:
10.1149/1.2981583
File:
PDF, 431 KB
english, 2008