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[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - Cleaning and Strip Requirement for Metal Gate Based CMOS Integration
Schram, Tom, Farid, Sebai, Cleas, Martine, Vos, Rita, Wada, Masayuki, Albert, Johan, Rohr, Erika, Kubicek, StefanYear:
2009
Language:
english
DOI:
10.1149/1.3202631
File:
PDF, 947 KB
english, 2009