[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - In-Situ Investigation of the Processes of Precursor Adsorption by Means of Ellipsometry and Mass Spectrometry
Igumenov, Igor K., Prozorov, Pavel, Semyannikov, Pyotr P., Zhukova, Irina N.Year:
2009
Language:
english
DOI:
10.1149/1.3207618
File:
PDF, 464 KB
english, 2009