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[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - Combination of Electron or Laser Beam Irradiation with High Vacuum Chemical Vapor Deposition (HV-CVD) of Al
Kuzminykh, Yury, Multone, Xavier, Hoffmann, PatrikYear:
2009
Language:
english
DOI:
10.1149/1.3207710
File:
PDF, 319 KB
english, 2009