Film Bulk Acoustic-Wave Resonator Based Relative Humidity...

Electrochemical and Solid-State Letters 2010 Vol. 13; Iss. 5

Film Bulk Acoustic-Wave Resonator Based Relative Humidity Sensor Using ZnO Films

Qiu, Xiaotun, Oiler, Jon, Zhu, Jie, Wang, Ziyu, Tang, Rui, Yu, Cunjiang, Yu, Hongyu
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Volume:
13
Year:
2010
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.3332397
File:
PDF, 234 KB
english, 2010
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