ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - Strain Stability in Nanoscale Patterned Strained Silicon-On-Insulator
Moutanabbir, Oussama, Reiche, Manfred, Hähnel, Angelika, Erfurth, W., Tarun, A., Hayazawa, N., Kawata, S., Naumann, F., Petzold, M.Year:
2010
Language:
english
DOI:
10.1149/1.3487581
File:
PDF, 1.05 MB
english, 2010