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ECS Transactions [ECS China Semiconductor Technology International Conference 2011 (CSTIC 2011) - Shanghai, China (March 13 - March 14, 2011)] - Advanced Direct-Polish Process on Organic Non-Porous Ultra Low-k Fluorocarbon Dielectric on Cu Interconnects
Gu, Xun, Nemoto, Takenao, Tomita, Yugo, Duyos Mateo, Ricardo, Teramoto, Akinobu, Kuroki, Shin-Ichiro, Sugawa, Shigetoshi, Ohmi, TadahiroYear:
2011
Language:
english
DOI:
10.1149/1.3567653
File:
PDF, 334 KB
english, 2011