Aging of Oxygen-Treated Trimethylsilane Plasma-Polymerized Films Using Spectroscopic Ellipsometry
El-Agez, Taher M., Wieliczka, David M., Moffitt, Chris, Taya, Sofyan A.Volume:
2011
Year:
2011
Language:
english
Journal:
Journal of Atomic, Molecular, and Optical Physics
DOI:
10.1155/2011/295304
File:
PDF, 278 KB
english, 2011