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Characterization of Defects and Stress in Polycrystalline Silicon Thin Films on Glass Substrates by Raman Microscopy
Kitahara, Kuninori, Ishii, Toshitomo, Suzuki, Junki, Bessyo, Takuro, Watanabe, NaokiVolume:
2011
Year:
2011
Language:
english
Journal:
International Journal of Spectroscopy
DOI:
10.1155/2011/632139
File:
PDF, 5.85 MB
english, 2011