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Structural and Optical Properties of Aluminum Nitride Thin Films Deposited by Pulsed DC Magnetron Sputtering
Choudhary, R. K., Mishra, P., Biswas, A., Bidaye, A. C.Volume:
2013
Year:
2013
Language:
english
Journal:
ISRN Materials Science
DOI:
10.1155/2013/759462
File:
PDF, 1.47 MB
english, 2013