Annealing of thin Zr films on Si1−xGex(0≤x≤1): X-ray diffraction and Raman studies
O. Chaix-Pluchery, B. Chenevier, V. Aubry-Fortuna, I. MatkoVolume:
63
Year:
2002
Language:
english
Pages:
12
DOI:
10.1016/s0022-3697(02)00175-0
File:
PDF, 328 KB
english, 2002