Deposition of CuInS2 thin films by RF reactive sputtering...

Journal of Physics and Chemistry of Solids 2003 Vol. 64; Iss. 9-10

Deposition of CuInS2 thin films by RF reactive sputtering with a ZnO:Al buffer layer

Y.B. He, W. Kriegseis, T. Krämer, A. Polity, M. Hardt, B. Szyszka, B.K. Meyer
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Volume:
64
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0022-3697(03)00207-5
File:
PDF, 228 KB
english, 2003
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