Correction of Scanning Steps to Improve Accuracy in Interferometric Profilometer
Sysoev, E., Kulikov, R., Vykhristyuk, I., Chugui, Yu.Volume:
15
Language:
english
Journal:
Measurement Science Review
DOI:
10.1515/msr-2015-0002
Date:
January, 2015
File:
PDF, 328 KB
english, 2015