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Deep Levels in Multilayer Structures of Si/Si0.8Ge0.2 Grown by Low-Pressure Chemical Vapor Deposition
Tokuda, Yutaka, Shirai, KenichiVolume:
799
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-799-z.34
Date:
January, 2003
File:
PDF, 135 KB
english, 2003