Processing and On-Wafer Measurements of Ferroelectric...

MRS Proceedings 2004 / 1 Vol. 811

Processing and On-Wafer Measurements of Ferroelectric Interdigitated Tunable Microwave Capacitors

Grishin, Alexander M., Kim, Jang-Yong, Khartsev, Sergey I.
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Volume:
811
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-811-d10.1
Date:
January, 2004
File:
PDF, 366 KB
english, 2004
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