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Mobility analysis of active isolation systems
S.J. Elliott, L. Benassi, M.J. Brennan, P. Gardonio, X. HuangVolume:
271
Year:
2004
Language:
english
Pages:
25
DOI:
10.1016/s0022-460x(03)00770-3
File:
PDF, 479 KB
english, 2004