Impact of Two-Step Growth upon In2O3(ZnO)5 Film Quality

Ogino, Tsuyoshi, Ohashi, Naoki, Sakaguchi, Isao, Hishita, Shunichi, Adachi, Yutaka, Haneda, Hajime

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Volume:

228-229

Year:

2002

Journal:

Key Engineering Materials

DOI:

10.4028/www.scientific.net/kem.228-229.167

File:

PDF, 530 KB

2002

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