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The Range Distribution of Er Ions Implanted in Silicon Crystal
Qin, Xi Feng, Liang, Yi, Wang, Feng XiangVolume:
474-476
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/kem.474-476.178
Date:
April, 2011
File:
PDF, 298 KB
english, 2011