Ion Beam Assisted Deposition of TiN Thin Films on Si...

Materials Science Forum 2006 Vol. 518

Ion Beam Assisted Deposition of TiN Thin Films on Si Substrate

Milinović, V., Milosavljević, M., Popović, M., Novaković, M., Peruško, D., Radović, I., Bibić, N.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
518
Year:
2006
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.518.155
File:
PDF, 325 KB
english, 2006
Conversion to is in progress
Conversion to is failed