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Numerical Study of Mixed Convection Flow in an Impinging Jet CVD Reactor for Atmospheric Pressure Deposition of Thin Films
Vanka, S. P., Luo, Gang, Glumac, Nick G.Volume:
126
Year:
2004
Language:
english
Journal:
Journal of Heat Transfer
DOI:
10.1115/1.1795232
File:
PDF, 1.28 MB
english, 2004