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Design and fabrication of piezoelectric nanocomposite structures for microdevice applications
Palevicius, Arvydas, Ponelyte, Sigita, Guobiene, Asta, Prosycevas, Igoris, Puiso, Judita, Sakalys, RokasVolume:
12
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.12.4.043004
Date:
December, 2013
File:
PDF, 4.39 MB
english, 2013