Kinetics of Deposition of Cu Thin Films in Supercritical...

Kinetics of Deposition of Cu Thin Films in Supercritical Carbon Dioxide Solutions from a F-Free Copper(II) β-Diketone Complex

Matsubara, Masahiro, Hirose, Michiru, Tamai, Kakeru, Shimogaki, Yukihiro, Kondoh, Eiichi
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Volume:
156
Year:
2009
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.3110918
File:
PDF, 416 KB
english, 2009
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