Two-dimensional analysis of fluctuation in an inductively...

Two-dimensional analysis of fluctuation in an inductively coupled plasma by a spectrovideo camera

Sayoko Fukui, Shin Tsuge, Kuniyuki Kitagawa, Norio Arai
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Volume:
68
Year:
2001
Language:
english
Pages:
7
DOI:
10.1016/s0026-265x(00)00148-x
File:
PDF, 1.01 MB
english, 2001
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