Effects of rapid thermal annealing in vacuum on electrical properties of thin Ta2O5–Si structures
D. Spassov, E. Atanassova, G. BeshkovVolume:
31
Year:
2000
Language:
english
Pages:
9
DOI:
10.1016/s0026-2692(00)00044-6
File:
PDF, 260 KB
english, 2000