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Modeling of thermal actuation in a bulk-micromachined CMOS micromirror
L.-A Liew, A Tuantranont, V.M BrightVolume:
31
Year:
2000
Language:
english
Pages:
11
DOI:
10.1016/s0026-2692(00)00061-6
File:
PDF, 1.16 MB
english, 2000