Silicon microstructure for precise measurements of mechanical moments
A Vujanic, N Adamovic, M Jakovljevic, W Brenner, G Popovic, H DetterVolume:
31
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0026-2692(00)00080-x
File:
PDF, 989 KB
english, 2000