Latchup characterization of 0.18-micron STI cobalt...

Microelectronics Journal 2001 Vol. 32; Iss. 9

Latchup characterization of 0.18-micron STI cobalt silicided test structures

Wang-Ling Goh, Kiat-Seng Yeo, Stephen Lazuardi, Wei Peng, Kam-Chew Leong, Lap Chan, Alex See
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Volume:
32
Year:
2001
Language:
english
Pages:
7
DOI:
10.1016/s0026-2692(01)00056-8
File:
PDF, 250 KB
english, 2001
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