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Introduction in space technologies, processing and applications of ULSI/WSI/3D-WSI on functional 3D nano- and optoelectronic elements
Alexandre N BubennikovVolume:
33
Year:
2002
Language:
english
Pages:
9
DOI:
10.1016/s0026-2692(02)00047-2
File:
PDF, 183 KB
english, 2002