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Generation lifetime improvement on MOS capacitor by fast neutron enhanced intrinsic gettering technique
Wu-Yih Uen, Shan-Ming Lan, Sen-Mao Liao, Jing-Ting ChiouVolume:
34
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0026-2692(02)00152-0
File:
PDF, 209 KB
english, 2003