High Performance IGZO TFTs with Modified Etch Stop Structure on Glass Substrates
Mahmoudabadi, Forough, Chuang, Ta-Ko, Kung, Jerry Ho, Hatalis, Miltiadis K.Volume:
1633
Year:
2014
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2014.192
File:
PDF, 310 KB
english, 2014