Block Co-Polymers for Nanolithography: Rapid Microwave Annealing for Pattern Formation on Substrates
Borah, Dipu, Rasappa, Sozaraj, Senthamaraikannan, Ramsankar, Holmes, Justin, Morris, MichaelVolume:
7
Language:
english
Journal:
Polymers
DOI:
10.3390/polym7040592
Date:
March, 2015
File:
PDF, 12.92 MB
english, 2015