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I2L speed improvement by an ion implantation modification to a standard bipolar process
J.P. Pieters, A.G.K. Lutsch, H.F. le RouxVolume:
14
Year:
1983
Language:
english
Pages:
9
DOI:
10.1016/s0026-2692(83)80220-1
File:
PDF, 356 KB
english, 1983