Inversion electron mobility in Si−SiO2 structures oxidized...

Inversion electron mobility in Si−SiO2 structures oxidized at low and high temperatures

J. Kassabov, D. Dimitrov, J. Koprinarova
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Volume:
17
Year:
1986
Language:
english
Pages:
8
DOI:
10.1016/s0026-2692(86)80132-x
File:
PDF, 624 KB
english, 1986
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