![](/img/cover-not-exists.png)
Inversion electron mobility in Si−SiO2 structures oxidized at low and high temperatures
J. Kassabov, D. Dimitrov, J. KoprinarovaVolume:
17
Year:
1986
Language:
english
Pages:
8
DOI:
10.1016/s0026-2692(86)80132-x
File:
PDF, 624 KB
english, 1986