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Study of thermal effects in GaAs micromachined power sensor microsystems by an optical interferometer technique
D. Pogany, N. Seliger, T. Lalinský, J. Kuzmík, P. Habaš, P. Hrkút, E. GornikVolume:
29
Year:
1998
Language:
english
Pages:
8
DOI:
10.1016/s0026-2692(97)00057-8
File:
PDF, 586 KB
english, 1998