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[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Crystallization of Double-Layered Silicon Thin Films by Solid Green Laser Annealing and Its Application to Low Temperature poly-Si Thin Film Transistors
Sugawara, Yuta, Uraoka, Y., Yano, Hiroshi, Hatayama, Tomoaki, Fuyuki, Takashi, Mimura, AkioVolume:
3
Year:
2006
Language:
english
DOI:
10.1149/1.2356351
File:
PDF, 408 KB
english, 2006