Calculation of the optimal FIB milling and deposition operations for easier and faster circuit reconfiguration
Romain Desplats, Timothee Dargnies, Jean-Christophe Courrege, Philippe Perdu, Jean-Louis NoulletVolume:
40
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0026-2714(00)00108-6
File:
PDF, 459 KB
english, 2000