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Low-field latent plasma damage depassivation in thin-oxide MOS
G. Cellere, A. Paccagnella, L. Pantisano, P. Colombo, M.G. ValentiniVolume:
40
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0026-2714(00)00133-5
File:
PDF, 449 KB
english, 2000