Room temperature grain growth in electroplated copper thin films
H. Wendrock, W. Brückner, M. Hecker, T.G. Koetter, H. SchloerbVolume:
40
Year:
2000
Language:
english
Pages:
4
DOI:
10.1016/s0026-2714(00)00145-1
File:
PDF, 304 KB
english, 2000