Dielectric breakdown distributions for void containing...

Microelectronics Reliability 2001 Vol. 41; Iss. 7

Dielectric breakdown distributions for void containing silicon substrates

R. Falster, F. Bonoli, V.V. Voronkov
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Volume:
41
Year:
2001
Language:
english
Pages:
5
DOI:
10.1016/s0026-2714(01)00048-8
File:
PDF, 122 KB
english, 2001
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