Reliability of ultrathin nitrided oxides grown in low pressure N2O ambient
M. Beichele, A.J. Bauer, H. RysselVolume:
41
Year:
2001
Language:
english
Pages:
4
DOI:
10.1016/s0026-2714(01)00071-3
File:
PDF, 260 KB
english, 2001