![](/img/cover-not-exists.png)
Reliability Studies on Multilevel Interconnection with Intermetal Dielectric Air Gaps
V. Sukharev, B.P. Shieh, R. Choudhury, C. Park, K.C. SaraswatVolume:
41
Year:
2001
Pages:
5
DOI:
10.1016/s0026-2714(01)00153-6
File:
PDF, 331 KB
2001