Stress induced leakage current at low field in ultra thin...

Stress induced leakage current at low field in ultra thin oxides

F. Lime, G. Ghibauda, G. Guégan
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Volume:
41
Year:
2001
Pages:
5
DOI:
10.1016/s0026-2714(01)00169-x
File:
PDF, 260 KB
2001
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