Deposition Method to Control Plasma-Enhanced Chemical Vapor...

Deposition Method to Control Plasma-Enhanced Chemical Vapor Deposition Tetraethylortho Silicate Oxide Charge

Carlson, Arvid C.
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Volume:
140
Year:
1993
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2056157
File:
PDF, 697 KB
english, 1993
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