Simulation and Experimental Validation of Scanning Capacitance Microscopy Measurements across Low-doped Epitaxial PN-Junction
M. Stangoni, M. Ciappa, M. Buzzo, M. Leicht, W. FichtnerVolume:
42
Year:
2002
Pages:
6
DOI:
10.1016/s0026-2714(02)00215-9
File:
PDF, 1.54 MB
2002