Lift-out techniques coupled with advanced TEM characterization methods for electrical failure analysis
N. Bicaı̈is-Lépinay, F. André, R. Pantel, S. Jullian, A. Margain, L.F.Tz. KwakmanVolume:
42
Year:
2002
Pages:
6
DOI:
10.1016/s0026-2714(02)00224-x
File:
PDF, 3.39 MB
2002