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Simultaneous IC-internal voltage and current measurements via a multi lever Scanning Force Microscope
C. Hartmann, R. Weber, W. Mertin, E. Kubalek, A.-D. Müller, M. HietscholdVolume:
42
Year:
2002
Pages:
4
DOI:
10.1016/s0026-2714(02)00226-3
File:
PDF, 1.58 MB
2002