Reliability analysis of CMOS MEMS structures obtained by...

Microelectronics Reliability 2002 Vol. 42; Iss. 9-11

Reliability analysis of CMOS MEMS structures obtained by Front Side Bulk Micromachining

M. Dardalhon, V. Beroulle, L. Latorre, P. Nouet, G. Perez, J.M. Nicot, C. Oudea
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Volume:
42
Year:
2002
Pages:
6
DOI:
10.1016/s0026-2714(02)00230-5
File:
PDF, 1.50 MB
2002
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