The advent of MEMS in space

Microelectronics Reliability 2003 Vol. 43; Iss. 7

The advent of MEMS in space

X. Lafontan, F. Pressecq, F. Beaudoin, S. Rigo, M. Dardalhon, J.-L. Roux, P. Schmitt, J. Kuchenbecker, B. Baradat, D. Lellouchi, C. Le-Touze, J.-M. Nicot
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Volume:
43
Year:
2003
Language:
english
Pages:
23
DOI:
10.1016/s0026-2714(03)00120-3
File:
PDF, 1.27 MB
english, 2003
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