Direct measurement of residual stress in integrated circuit interconnect features
A.B. Horsfall, J.M.M. dos Santos, S.M. Soare, N.G. Wright, A.G. O’Neill, S.J. Bull, A.J. Walton, A.M. Gundlach, J.T.M. StevensonVolume:
43
Year:
2003
Pages:
5
DOI:
10.1016/s0026-2714(03)00306-8
File:
PDF, 908 KB
2003