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High sensitivity and high resolution differential interferometer: Micrometric polariscope for thermomechanical studies in microelectronics
S. Dilhaire, T. Phan, E. Schaub, W. ClaeysVolume:
37
Year:
1997
Language:
english
Pages:
4
DOI:
10.1016/s0026-2714(97)00116-9
File:
PDF, 370 KB
english, 1997